In cooperation with Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. in Villingen-Schwenningen we have completed the project "Development and application of a function-integrated microactor based on ionic polymer-metal composites" (MEMS IPMC). The aim of the research project was the development of a functionally integrated microactuator based on ionic polymer-metal composites. It could be shown that micro actuators are suitable for the application as micro liquid pump and that IPMC actuators can also be used for this purpose based on the simulations carried out. Si-diaphragms for this purpose were selected according to simulations and were successfully coated with an ultrasonic spray coating with a polymer electrolyte layer and pores were filled using Nafion®.
The principle of ionic polymer-metal composites (IPMC) is used as the basis for the actuator activity of the Nafion® membrane used. Within an electric field, this results in movement, similar to an artificial muscle. However, in order to enable permanent use, e.g. in a micropump, the membrane must also be reinforced. For this purpose, suitable Si-MEMS structures have been developed which can withstand sufficiently frequent deflections and at the same time allow a sufficiently strong deflection to allow the use in micro-pumps.
- ZBT: Department new Materials and Technologies
- http://www.hsg-imit.de
- Member Association: IUTA
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