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Actuators for micropumps based on a Nafion® impregnated Si-carrier structure

In a now completed IGF project, Si-MEMS structures were investigated as a carrier structure for micro-actuators, taking advantage of the movement of Nafion membranes in an electric field.

The research project of the Research Association for Environmental Technology is funded via the AiF as part of the programme for the promotion of joint industrial research and development (IGF) by the Federal Ministry of Economics and Energy based on a decision of the German Bundestag.

AiF-FV-Number 18593 N 01.01.2017 to 31.03.2020

The technical concept

In cooperation with Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. in Villingen-Schwenningen we have completed the project "Development and application of a function-integrated microactor based on ionic polymer-metal composites" (MEMS IPMC). The aim of the research project was the development of a functionally integrated microactuator based on ionic polymer-metal composites. It could be shown that micro actuators are suitable for the application as micro liquid pump and that IPMC actuators can also be used for this purpose based on the simulations carried out. Si-diaphragms for this purpose were selected according to simulations and were successfully coated with an ultrasonic spray coating with a polymer electrolyte layer and pores were filled using Nafion®.

The principle of ionic polymer-metal composites (IPMC) is used as the basis for the actuator activity of the Nafion® membrane used. Within an electric field, this results in movement, similar to an artificial muscle. However, in order to enable permanent use, e.g. in a micropump, the membrane must also be reinforced. For this purpose, suitable Si-MEMS structures have been developed which can withstand sufficiently frequent deflections and at the same time allow a sufficiently strong deflection to allow the use in micro-pumps.

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